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Chlorine furnace - メーカー・企業と製品の一覧

Chlorine furnaceの製品一覧

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Compact chlorine furnace <Removal of metal impurities from carbon powder by dry chlorination>

Compact chlorine furnace <Removal of metal impurities from carbon powder by dry chlorination>

Protect the base material with negative pressure operation and oxygen partial pressure control, minimizing waste liquid with a dry process!

The "small chlorine furnace" enables the dry volatilization and removal of metal impurities such as Fe/Ni/Al remaining in carbon powder through selective chlorination using Cl2/HCl. By controlling chlorination and volatilization with a staged temperature profile, it achieves low residue levels in a short time while maintaining the crystallinity and specific surface area of the base material. Additionally, since it does not use acidic solvents such as hydrochloric acid or sulfuric acid, it reduces the burden of waste liquid treatment while enhancing the purity of the product. 【Features】 ■ Selectively volatilizes metal chlorides through chlorination ■ Dry process eliminates the need for water washing, simplifies post-processing, and improves yield and energy efficiency ■ Base material retention design: Maintains physical properties by controlling oxygen partial pressure and residence time *For more details, please download the PDF or feel free to contact us.

  • Industrial Furnace

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Compact Chlorine Furnace 'Serialization' Starts

Compact Chlorine Furnace 'Serialization' Starts

An easy-to-understand introduction to the background of the development of small chlorine generators, the specifications of the equipment, and operational points!

We will introduce the following topics regarding the small chlorine furnace we handle in a series: ■ Background of development ■ Impurity removal mechanism inside the chlorine furnace (chloride volatilization method) ■ Equipment specifications and operational points First, let's discuss "Why a chlorine furnace?" In recent years, with the miniaturization of semiconductors and the enhancement of battery performance, the management of metal impurities (conductive foreign substances such as Fe/Cu/Ni) required in powder raw materials has rapidly advanced to the ppm to ppb level. Even slight contamination can have a fatal impact on yield and reliability. Common countermeasures include: 1. Wet method (acid treatment): Dissolving and removing metal impurities with strong acids. 2. Dry method (magnetic separation): Recovering magnetic particles with powerful electromagnets. However, ■ While the wet method has the advantage of uniform removal, it poses challenges such as large amounts of wastewater, unsuitability for water-sensitive materials, and energy load from re-drying. ■ Magnetic separation is limited to magnetic particles and is less effective for non-magnetic metal compounds and fine attachments. *For more details, please download the PDF or feel free to contact us.

  • Industrial Furnace

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Compact chlorine furnace

Compact chlorine furnace

Applied as a metal removal process or reaction control furnace that does not produce water-repellent products or large amounts of waste liquid!

The "Chlorine Furnace" is a device that accommodates halogen gases such as Cl2 and HCl gas, utilizing Thermonic's unique technology. (CE, SEMI, UL standard certification) By adopting a shelf heater, it enables uniform heating, allowing Cl2 gas to diffuse throughout the sample for highly efficient reactions. Additionally, it can lower the boiling point of the generated chlorides, enabling processing at lower temperatures. 【Features】 ■ Accommodates halogen gases such as Cl2 and HCl gas through unique technology ■ Enables uniform heating with the adoption of a shelf heater ■ Allows Cl2 gas to diffuse throughout the sample for highly efficient reactions ■ Can lower the boiling point of generated chlorides, enabling processing at lower temperatures ■ Reduces the risk of leakage of Cl2 and HCl gas *For more details, please download the PDF or feel free to contact us.

  • Industrial Furnace

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Compact chlorine furnace <Removal of metal impurities from ceramics powder by dry chlorination>

Compact chlorine furnace <Removal of metal impurities from ceramics powder by dry chlorination>

Selectively volatilize Fe/Ni/Cr mixed in ceramic powder through chloride volatilization!

The "compact chlorine furnace" is a product that maintains phase and particle size through negative pressure operation and oxygen partial pressure control, while minimizing waste liquid without the need for cleaning. By using Cl2/HCl for selective chlorination, it removes metal impurities that were mixed in during the production of ceramic powders (SiO2/Al2O3/Si3N4) in a dry manner. Additionally, it reduces impurities in a short time while maintaining the composition, crystal phase, and particle size distribution of the mother phase through chlorine volatilization. This allows for the elimination of the washing process, thereby reducing re-drying and waste liquid treatment costs. 【Features】 ■ Selective chlorination × temperature staging: Prioritizes the volatilization of metal chlorides while maintaining the base material phase. ■ Dry process: Minimizes the burden of waste liquid and re-drying without the need for washing. ■ Physical property retention design: Maintains crystal phase, particle size, and specific surface area through control of oxygen partial pressure and residence time. *For more details, please download the PDF or feel free to contact us.

  • Industrial Furnace

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Compact Chlorine Furnace "Series Part 3": The Concept of "Safety" in Chlorine Furnaces

Compact Chlorine Furnace "Series Part 3": The Concept of "Safety" in Chlorine Furnaces

The essence of "managing risks" lies in design philosophy and operational design! Incorporating a sense of security into operations through design.

In the previous session, we introduced the principle of removing metal impurities by converting them into chlorides using a chlorine furnace (chloride volatilization). Today, we will address a common concern: "Isn't it dangerous to flow corrosive and toxic gases like Cl2 and HCl at high temperatures?" Tubular furnaces are readily available and versatile, making them suitable for the new synthesis of small sample sizes. However, there are undeniable "common issues" such as "a small effective heating area, which tends to limit scalability" and "the risk of small cracks in the tubes due to long-term use or thermal shock, increasing the risk of leakage during positive pressure operation." The equation "high temperature × corrosive gas = danger" is intuitively correct. That is why the essence lies in "managing danger" through design philosophy and operational design. The compact chlorine furnace from Thermonik ENG is built with this concept in mind. Design philosophy for safety: 1) Based on negative pressure (reduced pressure) operation, the furnace is equipped with a vacuum system that maintains the internal pressure consistently lower than atmospheric pressure. This suppresses any potential blowout in the event of seal degradation, thereby reducing the risk of Cl2/HCl leakage. *For more details, please download the PDF or feel free to contact us.

  • Industrial Furnace

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Compact chlorine furnace <Safe treatment of chlorine and hydrogen chloride>

Compact chlorine furnace <Safe treatment of chlorine and hydrogen chloride>

Achieved safe operation of chlorine and hydrogen chloride, which was difficult with conventional furnaces. Designed for high corrosion resistance to handle corrosive gases, enabling reproducible dry operation.

We handle a "small chlorine furnace" for research and development purposes. This device was developed to address issues such as the "high risk of gas leakage and poor safety" of tubular furnaces, and their unsuitability for sample scale-up and continuous testing. The equipment is a sealed structure furnace that can safely and controllably supply chlorine and hydrogen chloride, allowing for high reproducibility in dry processing using corrosive gases while ensuring sufficient sample amounts. 【Features】 ■ High corrosion-resistant materials: Achieved through Thermonic's unique technology for high corrosion resistance. ■ Easy scrubber connection: Simple connection with liquid absorption and two-stage neutralization towers. ■ Corrosive gas monitoring compatible: Can operate in conjunction with leakage detection sensors. ■ Scale adaptability: Capable of processing samples from several grams to several hundred grams. ■ Always operates under negative pressure: By operating at a pressure lower than atmospheric pressure, the risk of process gas leakage is reduced. *For more details, please feel free to contact us.

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Compact chlorine furnace <Cleaning with dry chlorination using a susceptor and quartz jig>

Compact chlorine furnace <Cleaning with dry chlorination using a susceptor and quartz jig>

Selective removal of accumulated films and reaction products by chloride volatilization! Maintains the dimensions and surface roughness of the base material.

The "Compact Chlorine Furnace" is a dry cleaning device for fixtures that uses "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered materials to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process minimizes waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, and metals (Mo/W/Al-based), among others. *For more details, please download the PDF or feel free to contact us.

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Small chlorine furnace <Impurity separation by selective volatilization of metal chlorides>

Small chlorine furnace <Impurity separation by selective volatilization of metal chlorides>

Impurities are chlorinated with chlorine/hydrochloric acid! They preferentially volatilize with vapor pressure differences and step temperatures.

The "Compact chlorine furnace" is a product that simplifies post-processing with dry separation and low contamination while leaving the base material intact and eliminating the need for cleaning. It converts metallic impurities in the material into volatile chlorides through selective chlorination using Cl2/HCl, and preferentially removes them through controlled temperature stages and residence times in a dry process. Additionally, by utilizing the vapor pressure difference and Gibbs free energy difference of metal chlorides, it can achieve high selectivity in separation without compromising the composition or crystalline phase of the base material, resulting in minimal wastewater discharge and reduced environmental impact and costs. 【Features】 ■ Selectivity: Utilizes the vapor pressure difference of chlorides to preferentially volatilize only target impurities. ■ Staged temperature profile: Sequential separation from low to medium temperature, minimizing damage to the base material. ■ Dry and low waste: Almost zero wastewater with no cleaning required, simplifying post-processing. *For more details, please download the PDF or feel free to contact us.

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Compact chlorine Furnace: Unlocking New Possibilities for Urban Mine Recycling through Dry Chlorination

Compact chlorine Furnace: Unlocking New Possibilities for Urban Mine Recycling through Dry Chlorination

We are theoretically examining a new approach to selectively volatilize and recover specific metals from systems containing multiple metals through precise control of "temperature × pressure × chlorination reaction."

The "chlorine furnace" we handle has a structure that allows for independent control of temperature and chlorine partial pressure under reduced pressure. Urban mines have a complex coexistence of metals such as Au, Cu, Sn, Fe, and Ni. If these can be separated using a dry chlorination volatilization method, it would be possible to implement a new recycling method that efficiently recovers valuable metals while reducing the burden of wastewater treatment. Additionally, due to the characteristics of this device, which allows for precise control of temperature, pressure, and chlorine partial pressure, we believe it could potentially develop into "selective recovery of valuable metals from urban mines" in the future. 【Features】 ■ Volatilization of base metals at low temperatures: Selective volatilization of FeCl3, SnCl4, etc., around 200-300°C ■ Control of noble metal salt generation at medium temperatures: Separation of noble metals using stable regions such as AuCl3 ■ Reaction sequence switching through pressure control: Control of the generation and decomposition equilibrium of chlorides under reduced pressure conditions *For more details, please feel free to contact us.

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Compact chlorine furnace <New experimental platform for high-temperature corrosion evaluation>

Compact chlorine furnace <New experimental platform for high-temperature corrosion evaluation>

Utilizing the high corrosion-resistant structure and precise atmosphere control of small chlorine furnaces, applications for research on corrosion mechanisms of metals, alloys, and ceramics.

Our company offers a "Chlorine Furnace" that can reproduce corrosion behavior in chlorine and hydrogen chloride atmospheres. This experimental furnace can safely replicate high-temperature and corrosive environments. It is theoretically expected to be applied in fundamental research on high-temperature corrosion mechanisms caused by chlorine gas, durability evaluations of chlorine-resistant materials (high alloys, coatings, ceramics), and testing platforms for corrosion prevention coatings. We also have test equipment available. 【Features】 ■ Compatible with corrosive gases such as chlorine and hydrogen chloride ■ Simultaneous control of reduced pressure and temperature ■ High-purity atmosphere due to dry structure ■ Reduced risk of process gas leakage due to constant reduced pressure atmosphere *For more details, please feel free to contact us.

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